Title :
A Smart Angular Rate Sensor System
Author :
Sharma, Ajit ; Zaman, Mohammad Faisal ; Ayazi, Farrokh
Author_Institution :
Georgia Inst. of Technol., Atlanta
Abstract :
This paper reports on the development of a smart angular rate sensor system for short range navigation applications. The smart-sensor system comprises of a high-Q, in plane mode-matched silicon tuning fork microgyroscope interfaced with a CMOS ASIC. A dedicated software algorithm interfaces with the sensor and IC to electronically control the bandwidth of the micro-sensor, thereby allowing for reconfigurability. The microgyroscope along with the interface IC and dedicated control algorithm form an angular rate sensor system with a maximum scale factor of 66 m V/deg/s and bias drift of less than 0.57deg/hr.
Keywords :
CMOS integrated circuits; angular velocity measurement; application specific integrated circuits; detector circuits; gyroscopes; intelligent sensors; microsensors; navigation; CMOS ASIC; high-Q silicon tuning fork; in plane mode-matched silicon tuning fork microgyroscope; microsensor; short range navigation application; smart angular rate sensor system; software algorithm; Application software; Application specific integrated circuits; Bandwidth; Control systems; Intelligent sensors; Navigation; Sensor systems; Silicon; Software algorithms; Vibrations;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388602