A Smart Angular Rate Sensor System

Author

Sharma, Ajit ; Zaman, Mohammad Faisal ; Ayazi, Farrokh

Author_Institution

Georgia Inst. of Technol., Atlanta

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

1116

Lastpage

1119

Abstract

This paper reports on the development of a smart angular rate sensor system for short range navigation applications. The smart-sensor system comprises of a high-Q, in plane mode-matched silicon tuning fork microgyroscope interfaced with a CMOS ASIC. A dedicated software algorithm interfaces with the sensor and IC to electronically control the bandwidth of the micro-sensor, thereby allowing for reconfigurability. The microgyroscope along with the interface IC and dedicated control algorithm form an angular rate sensor system with a maximum scale factor of 66 m V/deg/s and bias drift of less than 0.57deg/hr.

Keywords

CMOS integrated circuits; angular velocity measurement; application specific integrated circuits; detector circuits; gyroscopes; intelligent sensors; microsensors; navigation; CMOS ASIC; high-Q silicon tuning fork; in plane mode-matched silicon tuning fork microgyroscope; microsensor; short range navigation application; smart angular rate sensor system; software algorithm; Application software; Application specific integrated circuits; Bandwidth; Control systems; Intelligent sensors; Navigation; Sensor systems; Silicon; Software algorithms; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2007 IEEE

Conference_Location

Atlanta, GA

ISSN

1930-0395

Print_ISBN

978-1-4244-1261-7

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.4388602

Filename

4388602