A Novel Micro Rate Sensor using a Surface-Acoustic-Wave (SAW) Delay-line Oscillator

Author

Lee, Sang Woo ; Rhim, Jae Wook ; Park, Sin Wook ; Yang, Sang Sik

Author_Institution

Agency for Defense Dev., Daejeon

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

1156

Lastpage

1159

Abstract

A micro rate sensor (MRS) using a SAW oscillator is proposed for extremely high shock military applications. It is based on the SAW gyroscopic effect and consists of a pair of delay-line oscillators for a differential operating scheme. The SAW gyroscopic gain factor in ST-cut quartz not only is derived theoretically but also is verified by experiment. The 9times9 mm² SAWMRS was fabricated and loaded into a specially designed LTCC (Low Temperature Co-fired Ceramic) package. We evaluated the performance of the SAWMRS, using a rate table, revealing a sensitivity of 0.431 Hz/deg/s in the angular rates up to 2,000 deg/s and a white noise of 0.55 deg/s/VHz, respectively. Consequently, the feasibility of the proposed SAWMRS was verified, through a set of performance evaluations, confirming the theoretical predictions.

Keywords

ceramics; microsensors; oscillators; surface acoustic wave delay lines; surface acoustic wave sensors; SAW oscillator; gyroscopic gain factor; low temperature co-fired ceramic package; micro rate sensor; surface-acoustic-wave delay-line oscillator; Delay; Electric shock; Force sensors; Intelligent sensors; Micromechanical devices; Oscillators; Packaging; Sensor phenomena and characterization; Surface acoustic waves; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2007 IEEE

Conference_Location

Atlanta, GA

ISSN

1930-0395

Print_ISBN

978-1-4244-1261-7

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.4388612

Filename

4388612