DocumentCode
2209279
Title
Monitoring the evaporation of femtoliter droplets with CMOS integrated nanomechanical mass sensors
Author
Arcamone, J. ; Rius, G. ; Pérez-Murano, F. ; Dujardin, E. ; Ondarçuhu, T.
Author_Institution
CSIC, Bellaterra
fYear
2007
fDate
28-31 Oct. 2007
Firstpage
1160
Lastpage
1163
Abstract
We present a time-resolved study of the evaporation in air of minuscule sessile droplets deposited by nanodispensing techniques. Nanomechanical resonators are used to determine the time evolution of the mass of liquid droplets with high precision. We have studied the evaporation of droplets with diameters in the one micron range, which corresponds to volumes in the femtoliter range, nine orders of magnitude smaller than previously published data.
Keywords
CMOS integrated circuits; evaporation; liquid-vapour transformations; mass measurement; micromechanical resonators; microsensors; nanotechnology; CMOS integrated nanomechanical mass sensors; evaporation monitoring; femtoliter droplets; minuscule sessile droplets; nanodispensing techniques; nanomechanical resonators; time evolution; time-resolved study; CMOS image sensors; Calibration; Circuits; Monitoring; Nanoscale devices; Optical resonators; Optical sensors; Resonance; Resonant frequency; Sensor phenomena and characterization;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2007 IEEE
Conference_Location
Atlanta, GA
ISSN
1930-0395
Print_ISBN
978-1-4244-1261-7
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2007.4388613
Filename
4388613
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