Electron energy distribution function in a helicon discharge

Author

Tysk, S. ; Scharer, J. ; Akhtar, K. ; White, Bruce

Author_Institution

Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA

fYear

2002

fDate

26-30 May 2002

Firstpage

224

Abstract

Summary form only given. A miniature, fast time response, gridded energy analyzer (GEA) is designed and constructed to measure the electron energy distribution function (EEDF) in a helicon plasma and compare with density, wave magnetic field, and Ar II optical emission results. These plasmas demonstrate an ionization efficiency greater than would be expected for their typical 3 eV electron temperature. The enhanced ionization effects may be partially explained by elevated quantities of high temperature electrons in the 20-50 eV range. Energy analyzer measurements of the EEDF can provide a more complete picture of helicon plasma source properties in different regimes.

Keywords

discharges (electric); ionisation; plasma transport processes; 20 to 50 eV; Ar; Ar II optical emission; density; electron energy distribution function; electron temperature; gridded energy analyzer; helicon discharge; ionization effects; ionization efficiency; wave magnetic field; Distribution functions; Electrons; Energy measurement; Ionization; Magnetic analysis; Magnetic field measurement; Plasma density; Plasma measurements; Plasma temperature; Plasma waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2002. ICOPS 2002. IEEE Conference Record - Abstracts. The 29th IEEE International Conference on

Conference_Location

Banff, Alberta, Canada

Print_ISBN

0-7803-7407-X

Type

conf

DOI

10.1109/PLASMA.2002.1030477

Filename

1030477