Title :
A Multi-Parameter Platform For Gas Sensing Using Semiconducting Metal Oxide Films
Author :
Zhong, Guixiong ; Bernhardt, George ; Lad, Robert ; Collins, Scott ; Smith, Rosemary
Author_Institution :
Univ. of Maine, Orono
Abstract :
A multi-parameter sensor platform for engineering gas responsive semiconducting metal oxide (SMO) materials and gas sensors is demonstrated. The platform combines a chemiresistor with a Metal Oxide Semiconductor (MOS) capacitor for the detection of oxidation-reduction reactions occurring in SMO films. With this platform, changes in resistance, work function, and capacitance of the SMO film can be simultaneously measured upon exposure to reducing or oxidizing gases, such as NOx, CO, H2O or O2. The relative contributions of materials parameters on sensor response can be elucidated from the resulting measurements and utilized for improved understanding of sensing mechanisms and optimizing sensor design.
Keywords :
MOS capacitors; gas sensors; work function; MOS capacitor; SMO films; chemiresistor; gas responsive semiconducting metal oxide materials; gas sensing; gas sensors; metal oxide semiconductor capacitor; multiparameter sensor platform; oxidation-reduction reactions; semiconducting metal oxide films; sensor response; work function; Capacitance measurement; Chemical sensors; Electrical resistance measurement; Gas detectors; Gases; Inorganic materials; MOS capacitors; Semiconductivity; Semiconductor films; Semiconductor materials;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388630
