• DocumentCode
    2209669
  • Title

    Author index

  • fYear
    1998
  • fDate
    4-5 June 1998
  • Abstract
    The author index contains an entry for each author and coauthor included in the proceedings record.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Process-Induced Damage, 1998 3rd International Symposium on
  • Conference_Location
    Honolulu, HI, USA
  • Print_ISBN
    0-9651577-2-5
  • Type

    conf

  • DOI
    10.1109/PPID.1998.725617
  • Filename
    725617