Title :
Sensor Calibration of Planar Four-Contact Devices with up to Two Extended Contacts
Author :
Cornils, Martin ; Paul, Oliver
Author_Institution :
Univ. of Freiburg, Freiburg
Abstract :
This paper reports on a novel method for the calibration of planar four-contact sensors making it possible to extract the sheet resistance Rsq of their conducting layer with minimal effort. We present extensions of van der Pauw´s method to determine Rsq holding for arbitrarily shaped four-terminal devices with one and two extended contacts. This is achieved by performing three and four electrical resistance measurements, respectively, on these devices. The results are obtained using the method of conformal mapping in combination with the method of images. Using finite-element analysis, our findings were verified to hold with a relative accuracy of better than 0.055%. Experimental tests with differently shaped structures corroborate the theoretical results.
Keywords :
calibration; electric resistance measurement; electric sensing devices; finite element analysis; conformal mapping; electrical resistance measurements; extended contacts; finite element analysis; planar four contact sensors; sensor calibration; sheet resistance; Calibration; Chemical sensors; Conformal mapping; Contact resistance; Electric resistance; Electrical resistance measurement; Finite element methods; Semiconductor device testing; System testing; Temperature sensors;
Conference_Titel :
Sensors, 2007 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
978-1-4244-1261-7
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2007.4388638