Fuzzy generalized predictive control of microvibration for a micro-manufacturing platform

A 6-degree-of-freedom microvibration isolation system for a micro-manufacturing platform has been developed. This system uses four air springs as passive vibration isolation elements and eight giant magnetostrictive actuators as active vibration isolation elements. Four vertical actuators and air springs are set in parallel to make use of the giant magnetostrictive actuators effectively. Six sensors are used to measure the displacement of the platform for control. The equation of motion of the vibration isolation system is converted into the equation of motion for modal coordinates by applying the normalized modal matrix. The control system for each mode is designed independently. A fuzzy generalized predictive control approach is used to design the modal controller. The simulation results show that the developed active vibration control system has good isolation performance against the floor disturbance over wide frequency area.