Title : 
Considerations on oxide reliability QC
         
        
        
            Author_Institution : 
Device Development Center, Hitachi, Ltd.
         
        
        
        
        
        
            Keywords : 
Acceleration; Dielectric breakdown; Dielectric measurements; Failure analysis; Laboratories; Power engineering and energy; Quality assurance; Reliability engineering; Semiconductor device modeling; Weibull distribution;
         
        
        
        
            Conference_Titel : 
Integrated Reliability Workshop Final Report, 1993 International
         
        
        
            DOI : 
10.1109/IRWS.1993.666292