Title :
Separating DC biasing from RF modulation in EO polymer modulators integrated with mechanical resonators
Author :
Yacoubian, A. ; Weiping Lin ; Khadjeturians, H. ; Bechtel, J. ; Johnson, G.C.
Author_Institution :
IPITEK, Carlsbad, CA, USA
Abstract :
DC biasing and RF modulation of polymer modulators are separated by heterogeneously integrating them with mechanical resonators. Feasibility of integration with MEMS is investigated, and biasing is experimentally demonstrated by integration with a piezoelectric element.
Keywords :
Mach-Zehnder interferometers; electro-optical modulation; micromechanical resonators; microwave photonics; optical communication equipment; optical polymers; piezoelectric devices; DC biasing; MEMS structures; MZ modulator; RF modulation; electro-optic polymer modulators; mechanical biasing; mechanical resonators; piezoelectric element; polymer/MEMS integration; Electrooptic devices; Electrooptic modulators; Electrooptical waveguides; Etching; Hafnium; Micromechanical devices; Optical resonators; Optical waveguides; Polymer films; Radio frequency;
Conference_Titel :
Microwave Photonics, 2001. MWP '01. 2001 International Topical Meeting on
Conference_Location :
Long Beach, CA, USA
Print_ISBN :
0-7803-7003-1
DOI :
10.1109/MWP.2002.981755
