• DocumentCode
    2211506
  • Title

    A new resistive probe with higher resolution

  • Author

    Lee, Jaehong ; Kim, Junsoo ; Jung, Juhwan ; Hong, Seungbum ; Park, Byung-Gook ; Lee, Jong Duk ; Shin, Hyungcheol

  • Author_Institution
    Sch. of EE, Seoul Nat. Univ., Seoul
  • Volume
    1
  • fYear
    2006
  • fDate
    22-25 Oct. 2006
  • Firstpage
    114
  • Lastpage
    115
  • Abstract
    We have proposed a new apex shaped semiconductor probe with resistive tip. Its improved characteristics are shown by using three-dimensional simulation tool (SILVACOtrade).
  • Keywords
    ion implantation; probes; semiconductor devices; sensors; SILVACO; apex shaped semiconductor probe; higher resolution; resistive probe; three-dimensional simulation tool; Curve fitting; Diffusion processes; Dry etching; Fabrication; Ion implantation; Laboratories; Probes; Semiconductor devices; Semiconductor materials; Shape;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE
  • Conference_Location
    Gyeongju
  • Print_ISBN
    978-1-4244-0540-4
  • Electronic_ISBN
    978-1-4244-0541-1
  • Type

    conf

  • DOI
    10.1109/NMDC.2006.4388710
  • Filename
    4388710
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2211506