Title :
A new resistive probe with higher resolution
Author :
Lee, Jaehong ; Kim, Junsoo ; Jung, Juhwan ; Hong, Seungbum ; Park, Byung-Gook ; Lee, Jong Duk ; Shin, Hyungcheol
Author_Institution :
Sch. of EE, Seoul Nat. Univ., Seoul
Abstract :
We have proposed a new apex shaped semiconductor probe with resistive tip. Its improved characteristics are shown by using three-dimensional simulation tool (SILVACOtrade).
Keywords :
ion implantation; probes; semiconductor devices; sensors; SILVACO; apex shaped semiconductor probe; higher resolution; resistive probe; three-dimensional simulation tool; Curve fitting; Diffusion processes; Dry etching; Fabrication; Ion implantation; Laboratories; Probes; Semiconductor devices; Semiconductor materials; Shape;
Conference_Titel :
Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE
Conference_Location :
Gyeongju
Print_ISBN :
978-1-4244-0540-4
Electronic_ISBN :
978-1-4244-0541-1
DOI :
10.1109/NMDC.2006.4388710
