DocumentCode :
2211849
Title :
The Use of Statistical Methods to Insure the Quality and Optimization of Polysilicon Deposition
Author :
Aceves-Mijares, Mariano ; Murphy-Arteaga, Roberto ; Torres-Jacome, Alfonso ; Calleja-Arriaga, Wilfrido
Author_Institution :
Instituto Nacional De Astrofisica, Optica Y Electronica
fYear :
1993
fDate :
24-27 Oct 1993
Firstpage :
105
Lastpage :
112
Keywords :
Analysis of variance; Chemicals; Extraterrestrial measurements; Fabrication; Optimization methods; Rotation measurement; Statistical analysis; Temperature; Thickness control; Thickness measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Integrated Reliability Workshop Final Report, 1993 International
Type :
conf
DOI :
10.1109/IRWS.1993.666298
Filename :
666298
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2211849
بازگشت