Title :
Latest advances in nanomaterial characterisation: from the micron scale to the atom scale
Author :
Horréard, F. ; Hillion, F. ; Renaud, L. ; Schuhmacher, M.
Author_Institution :
CAMECA, Gennevilliers
Abstract :
This paper concentrates on the recent developments or breakthroughs of two main analytical techniques used in the field : SIMS and atom probe.
Keywords :
nanostructured materials; nanotechnology; secondary ion mass spectroscopy; SIMS technique; atom probe technique; nanomaterial characterisation; Atomic beams; Atomic layer deposition; Atomic measurements; Chemical elements; Energy resolution; Instruments; Ionization; Lenses; Nanotechnology; Probes;
Conference_Titel :
Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE
Conference_Location :
Gyeongju
Print_ISBN :
978-1-4244-0541-1
Electronic_ISBN :
978-1-4244-0541-1
DOI :
10.1109/NMDC.2006.4388733
