DocumentCode
2211994
Title
Latest advances in nanomaterial characterisation: from the micron scale to the atom scale
Author
Horréard, F. ; Hillion, F. ; Renaud, L. ; Schuhmacher, M.
Author_Institution
CAMECA, Gennevilliers
Volume
1
fYear
2006
fDate
22-25 Oct. 2006
Firstpage
174
Lastpage
175
Abstract
This paper concentrates on the recent developments or breakthroughs of two main analytical techniques used in the field : SIMS and atom probe.
Keywords
nanostructured materials; nanotechnology; secondary ion mass spectroscopy; SIMS technique; atom probe technique; nanomaterial characterisation; Atomic beams; Atomic layer deposition; Atomic measurements; Chemical elements; Energy resolution; Instruments; Ionization; Lenses; Nanotechnology; Probes;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE
Conference_Location
Gyeongju
Print_ISBN
978-1-4244-0541-1
Electronic_ISBN
978-1-4244-0541-1
Type
conf
DOI
10.1109/NMDC.2006.4388733
Filename
4388733
Link To Document