Title :
GaAs MEMS for Millimeter Wave Communications
Author :
Muller, Alexandru ; Konstantinidis, George ; Neculoiu, Dan ; Plana, Robert
Author_Institution :
IMT Bucharest, 32B, Erou Iancu Nicolae Street, 72996, Bucharest, Romania, Phone: +40.21.4908581
Abstract :
The paper presents the authors´ contributions towards the development of millimeter wave circuits based on GaAs micromachining. The manufacturing and characterization of different type of millimeter wave GaAs membrane supported filter structures is presented. A fully monolithically integrated millimeter wave receiver module, having the antenna as well as the detecting Schottky diode on the same GaAs membrane is also presented.
Keywords :
Biomembranes; Circuits; Filters; Gallium arsenide; MIMICs; Manufacturing; Micromachining; Micromechanical devices; Millimeter wave communication; Receiving antennas;
Conference_Titel :
Microwave Conference, 2003 33rd European
Conference_Location :
Munich, Germany
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMA.2003.340819
