DocumentCode
2212301
Title
Analysis and modeling of resistive probes
Author
Wan Kim, Sang ; Young Choi, Woo ; Young Song, Jae ; Pil Kim, Jong ; Kim, Junsoo ; Ko, Hyoungsoo ; Park, Hongsik ; Park, Chulmin ; Hong, Seungbum ; Choa, Sung-Hoon ; Duk Lee, Jong ; Shin, Hyungcheol ; Park, Byung-Gook
Author_Institution
Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., Seoul
Volume
1
fYear
2006
fDate
22-25 Oct. 2006
Firstpage
318
Lastpage
319
Abstract
A simple model of the resistive probe was proposed for the first time to enhance its sensitivity. The model classifies output current into three components: sensing current, unmodulated current, and punch-through current. Based on it, the electrical performance of the resistive probe was analyzed. The proposed model is expected to contribute to improvement of the sensing performance of the resistive probe.
Keywords
electrical resistivity; ferroelectric devices; probes; punch-through current; resistive probes; sensing current; sensitivity enhancement; unmodulated current; Computer science; Electrons; Ferroelectric materials; Microscopy; Performance analysis; Probes; Silicon; Surface resistance; Temperature sensors; Voltage; analysis; modeling; resistive probe; sensitivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE
Conference_Location
Gyeongju
Print_ISBN
978-1-4244-0540-4
Electronic_ISBN
978-1-4244-0541-1
Type
conf
DOI
10.1109/NMDC.2006.4388746
Filename
4388746
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