DocumentCode
2212329
Title
Characterization of Wafer Charging Mechanisms and Oxide Survival Prediction Methodology
Author
Lukaszek, W. ; Dixon, Warren
Author_Institution
Stanford University
fYear
1993
fDate
24-27 Oct 1993
Firstpage
117
Lastpage
123
Keywords
Charge measurement; Current measurement; EPROM; Ion implantation; Monitoring; Performance evaluation; Sensor phenomena and characterization; Sensor systems; Surface charging; Voltmeters;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Reliability Workshop Final Report, 1993 International
Type
conf
DOI
10.1109/IRWS.1993.666300
Filename
666300
Link To Document