• DocumentCode
    2213559
  • Title

    Fabrication of carbon nanotubes by anodic aluminum oxide nano-template

  • Author

    Lee, Jaehyeong ; Choi, Sunghun

  • Author_Institution
    Kunsan Nat. Univ., Kunsan
  • Volume
    1
  • fYear
    2006
  • fDate
    22-25 Oct. 2006
  • Firstpage
    426
  • Lastpage
    427
  • Abstract
    Anodic aluminum oxide (AAO) nano template was prepared by a two-step anodization method and Ni particles were carefully deposition at the bottom of pore of the template. Microwave plasma enhanced chemical vapor deposition (MPECVD) method was used grow carbon nanotubes (CNTs) on the template with this nickel as catalyst and CH4 as carbon source.
  • Keywords
    anodisation; carbon nanotubes; catalysts; chemical vapour deposition; elemental semiconductors; nanotechnology; plasma CVD; semiconductor nanotubes; CH4; CH4 - Binary; Ni; Ni - Element; anodic aluminum oxide nano-template; carbon nanotubes Fabrication; microwave plasma enhanced chemical vapor deposition method; two-step anodization method; Aluminum oxide; Carbon nanotubes; Chemical vapor deposition; Electromagnetic heating; Fabrication; Glass; Plasma applications; Plasma chemistry; Plasma temperature; Substrates; Anodic Aluminum Oxide (AAO); MPECVD; carbon nanotubes(CNTs);
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE
  • Conference_Location
    Gyeongju
  • Print_ISBN
    978-1-4244-0541-1
  • Electronic_ISBN
    978-1-4244-0541-1
  • Type

    conf

  • DOI
    10.1109/NMDC.2006.4388799
  • Filename
    4388799
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2213559