Title :
Fabrication of carbon nanotubes by anodic aluminum oxide nano-template
Author :
Lee, Jaehyeong ; Choi, Sunghun
Author_Institution :
Kunsan Nat. Univ., Kunsan
Abstract :
Anodic aluminum oxide (AAO) nano template was prepared by a two-step anodization method and Ni particles were carefully deposition at the bottom of pore of the template. Microwave plasma enhanced chemical vapor deposition (MPECVD) method was used grow carbon nanotubes (CNTs) on the template with this nickel as catalyst and CH4 as carbon source.
Keywords :
anodisation; carbon nanotubes; catalysts; chemical vapour deposition; elemental semiconductors; nanotechnology; plasma CVD; semiconductor nanotubes; CH4; CH4 - Binary; Ni; Ni - Element; anodic aluminum oxide nano-template; carbon nanotubes Fabrication; microwave plasma enhanced chemical vapor deposition method; two-step anodization method; Aluminum oxide; Carbon nanotubes; Chemical vapor deposition; Electromagnetic heating; Fabrication; Glass; Plasma applications; Plasma chemistry; Plasma temperature; Substrates; Anodic Aluminum Oxide (AAO); MPECVD; carbon nanotubes(CNTs);
Conference_Titel :
Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE
Conference_Location :
Gyeongju
Print_ISBN :
978-1-4244-0541-1
Electronic_ISBN :
978-1-4244-0541-1
DOI :
10.1109/NMDC.2006.4388799
