Study of influenced pressure condition at deposited carbon nanotubes in low temperature

Author

Lee, Jaehyeong ; Choi, Sunghun

Author_Institution

Kunsan Nat. Univ., Kunsan

Volume

1

fYear

2006

fDate

22-25 Oct. 2006

Firstpage

438

Lastpage

439

Abstract

Carbon nanotubes (CNTs) have been grown on glass substrate coated with metal catalysts containing Ni by microwave plasma enhanced chemical vapor deposition using mixtures of methane and hydrogen. In addition TiN metal was coated buffer layer between Ni layer and glass substrate. CNTs growth length increased with deposited process pressure. SEM (scaning electron microscopy) and TEM (transmission electron microscopy) image show CNTs diameter and density are varied with deposition conditions. Raman spectroscopy of CNTs show that D-band and G-band peak positions around 1370 cm^-1 and 1590 cm^-1.

Keywords

Raman spectroscopy; carbon nanotubes; catalysts; nanotechnology; plasma CVD; scanning electron microscopy; transmission electron microscopy; Raman spectroscopy; SEM; TEM; carbon nanotube deposition; coated buffer layer; glass substrate coating; metal catalysts; microwave plasma enhanced chemical vapor deposition; pressure condition; scanning electron microscopy; transmission electron microscopy; Carbon nanotubes; Chemical vapor deposition; Glass; Hydrogen; Plasma chemistry; Plasma density; Plasma temperature; Scanning electron microscopy; Tin; Transmission electron microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE

Conference_Location

Gyeongju

Print_ISBN

978-1-4244-0541-1

Electronic_ISBN

978-1-4244-0541-1

Type

conf

DOI

10.1109/NMDC.2006.4388805

Filename

4388805