Title :
Wafer Level Integration of a 24 GHz Differential SiGe-MMIC Oscillator with a Patch Antenna using BCB as a Dielectric Layer
Author :
Abele, P. ; Öjefors, E. ; Schad, K.-B. ; Sönmez, E. ; Trasser, A. ; Konle, J. ; Schumacher, H.
Author_Institution :
Dept. of Electron Devices and Circuits, University of Ulm, Albert-Einstein-Allee 45, D-89081 Ulm, Germany. email: pabele@ebs.e-technik.uni-ulm.de, Phone: +49 731 5031593, Fax: +49 731 5026155
Abstract :
This paper describes the wafer level integration of a differential 24GHz SiGe-MMIC oscillator including a buffer amplifier with a differentially driven patch antenna. The patch antenna is realized on 30¿m BCB (Benzo Cyclo Butene) used as a dielectric layer. The radiated power of the patch antenna driven by the oscillator is calculated based on measurements and the result is discussed.
Keywords :
Capacitors; Dielectrics; Differential amplifiers; Etching; Frequency; Inductors; MMICs; Oscillators; Patch antennas; Silicon;
Conference_Titel :
Microwave Conference, 2003 33rd European
Conference_Location :
Munich, Germany
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMA.2003.340948
