• DocumentCode
    2213940
  • Title

    Simulation of Si/SiGe micro-cooler by thermal quadrupoles method

  • Author

    Ezzahri, Y. ; Dilhaire, S. ; Grauby, S. ; Patino-Lopez, L.D. ; Claeys, W. ; Zhang, Y. ; Bian, Z. ; Shakouri, A.

  • Author_Institution
    Centre de Physique Moleculaire Optique et Hertzienne, Bordeaux Univ., Talence, France
  • fYear
    2005
  • fDate
    19-23 June 2005
  • Firstpage
    256
  • Lastpage
    260
  • Abstract
    A new method based on thermal quadrupoles is presented to model the behavior of a single stage Si/SiGe micro-cooler in AC operating regime. The cold side temperature is calculated for different excitation frequencies, current magnitudes and device sizes. The sensitivity and precision of this method come from its analytical expressions, which are based on the solution of the Fourier heat equation in Laplace space. We assume that the thermal properties of the device are temperature independent. Action of each layer is represented by a matrix which relates the temperature-flux vectors at both sides in the frequency domain. A comparison of the model with experimental reflectometry techniques is also presented. Performance of Si/SiGe micro-coolers can be optimized by a combination of optical characterization techniques and the thermal quadrupoles simulation.
  • Keywords
    Ge-Si alloys; cooling; elemental semiconductors; silicon; thermoelectric devices; thermoelectricity; Fourier heat equation; Laplace space; Si-SiGe; cold side temperature; excitation frequencies; micro-cooler; optical characterization; reflectometry; sensitivity; temperature-flux vectors; thermal quadrupole simulation; Doping; Frequency; Germanium silicon alloys; Microelectronics; Semiconductor films; Silicon germanium; Substrates; Superlattices; Temperature; Thermoelectricity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermoelectrics, 2005. ICT 2005. 24th International Conference on
  • ISSN
    1094-2734
  • Print_ISBN
    0-7803-9552-2
  • Type

    conf

  • DOI
    10.1109/ICT.2005.1519932
  • Filename
    1519932