DocumentCode
2213940
Title
Simulation of Si/SiGe micro-cooler by thermal quadrupoles method
Author
Ezzahri, Y. ; Dilhaire, S. ; Grauby, S. ; Patino-Lopez, L.D. ; Claeys, W. ; Zhang, Y. ; Bian, Z. ; Shakouri, A.
Author_Institution
Centre de Physique Moleculaire Optique et Hertzienne, Bordeaux Univ., Talence, France
fYear
2005
fDate
19-23 June 2005
Firstpage
256
Lastpage
260
Abstract
A new method based on thermal quadrupoles is presented to model the behavior of a single stage Si/SiGe micro-cooler in AC operating regime. The cold side temperature is calculated for different excitation frequencies, current magnitudes and device sizes. The sensitivity and precision of this method come from its analytical expressions, which are based on the solution of the Fourier heat equation in Laplace space. We assume that the thermal properties of the device are temperature independent. Action of each layer is represented by a matrix which relates the temperature-flux vectors at both sides in the frequency domain. A comparison of the model with experimental reflectometry techniques is also presented. Performance of Si/SiGe micro-coolers can be optimized by a combination of optical characterization techniques and the thermal quadrupoles simulation.
Keywords
Ge-Si alloys; cooling; elemental semiconductors; silicon; thermoelectric devices; thermoelectricity; Fourier heat equation; Laplace space; Si-SiGe; cold side temperature; excitation frequencies; micro-cooler; optical characterization; reflectometry; sensitivity; temperature-flux vectors; thermal quadrupole simulation; Doping; Frequency; Germanium silicon alloys; Microelectronics; Semiconductor films; Silicon germanium; Substrates; Superlattices; Temperature; Thermoelectricity;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermoelectrics, 2005. ICT 2005. 24th International Conference on
ISSN
1094-2734
Print_ISBN
0-7803-9552-2
Type
conf
DOI
10.1109/ICT.2005.1519932
Filename
1519932
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