The distribution of temperature pattern and of stress field on metallic target under the effect of plasma fluxes with different intensity and energy

The distribution of temperature pattern and of stress field on molybdenum and aluminum targets under the effect of plasma with different intensity and energy is discussed. The effect of plasma fluxes (charged particles) on metals involves the disturbance of target atoms due to collision processes and heat conductivity, which causes thermal vibrations of the atoms. The following situations were discussed: thermal effect regions of adjacent particles do not overlap even at large-angle scattering; thermal effect regions can overlap at large-angle scattering but cannot overlap at small-angle scattering; and thermal effect regions overlap even at small-angle scattering