• DocumentCode
    2214793
  • Title

    Ellipsometry for Measurement of Complex Dielectric Permittivity in Millimeter-Wave Region

  • Author

    Tsuzukiyama, Koji ; Sakai, Taiji ; Yamazaki, Takaaki ; Hashimoto, Osamu

  • Author_Institution
    Mitsui Chemicals, INC., 580-32 Nagaura, Sodegaura Chiba, 299-0265 Japan, Tel:+81-438-64-2327, E-mail: Koji.Tsuzukiyama@mitsui-chem.co.jp
  • fYear
    2003
  • fDate
    Oct. 2003
  • Firstpage
    487
  • Lastpage
    490
  • Abstract
    The ellipsometry method is extended to a measurement for complex permittivities of materials in millimeter-wave region. We propose an effective technique based on the Fourier analysis method to eliminate an uncertainty due to the free-space method. Complex permittivities can be measured with a high degree of accuracy by the improved ellipsometry method, as named Fourier Analysis Correction Ellipsometry (FACE) Method.
  • Keywords
    Antenna measurements; Detectors; Dielectric measurements; Electromagnetic measurements; Electromagnetic wave polarization; Ellipsometry; Frequency; Millimeter wave measurements; Millimeter wave technology; Permittivity measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 2003 33rd European
  • Conference_Location
    Munich, Germany
  • Print_ISBN
    1-58053-834-7
  • Type

    conf

  • DOI
    10.1109/EUMA.2003.340996
  • Filename
    4143060