A micromachined fully differential lateral accelerometer

Author

Lemkin, Mark ; Boser, Bernhard E.

Author_Institution

Sensor & Actuator Center, California Univ., Berkeley, CA, USA

fYear

1996

fDate

5-8 May 1996

Firstpage

315

Lastpage

318

Abstract

A monolithic surface micromachined lateral accelerometer with on-chip A/D converter is described. The device features a fully differential capacitive interface between the sensing element and on-chip electronics to minimize the systematic offset and errors due to switch charge injection. The common centroid layout of the sensor interface reduces cross-axis sensitivity and susceptibility to angular accelerations. The measured noise-floor of the device is 500 μg/√(Hz) and the fullscale range is ±3.5 g(1 g=9.8m/sec ²)

Keywords

accelerometers; analogue-digital conversion; micromachining; micromechanical devices; semiconductor device noise; angular acceleration susceptibility; capacitive interface; common centroid layout; cross-axis sensitivity; fully differential lateral accelerometer; noise-floor; on-chip A/D converter; sensing element; surface micromachined device; switch charge injection; systematic offset; Acceleration; Accelerometers; Capacitive sensors; Consumer electronics; Fabrication; Mechanical sensors; Micromechanical devices; Springs; Substrates; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Custom Integrated Circuits Conference, 1996., Proceedings of the IEEE 1996

Conference_Location

San Diego, CA

Print_ISBN

0-7803-3117-6

Type

conf

DOI

10.1109/CICC.1996.510566

Filename

510566