Title :
A micromachined fully differential lateral accelerometer
Author :
Lemkin, Mark ; Boser, Bernhard E.
Author_Institution :
Sensor & Actuator Center, California Univ., Berkeley, CA, USA
Abstract :
A monolithic surface micromachined lateral accelerometer with on-chip A/D converter is described. The device features a fully differential capacitive interface between the sensing element and on-chip electronics to minimize the systematic offset and errors due to switch charge injection. The common centroid layout of the sensor interface reduces cross-axis sensitivity and susceptibility to angular accelerations. The measured noise-floor of the device is 500 μg/√(Hz) and the fullscale range is ±3.5 g(1 g=9.8m/sec 2)
Keywords :
accelerometers; analogue-digital conversion; micromachining; micromechanical devices; semiconductor device noise; angular acceleration susceptibility; capacitive interface; common centroid layout; cross-axis sensitivity; fully differential lateral accelerometer; noise-floor; on-chip A/D converter; sensing element; surface micromachined device; switch charge injection; systematic offset; Acceleration; Accelerometers; Capacitive sensors; Consumer electronics; Fabrication; Mechanical sensors; Micromechanical devices; Springs; Substrates; Switches;
Conference_Titel :
Custom Integrated Circuits Conference, 1996., Proceedings of the IEEE 1996
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-3117-6
DOI :
10.1109/CICC.1996.510566
