Title :
Research status and development of magnetically suspended rotor gyroscopes
Author :
Xue, Gang ; Li, Tao ; Zhang, Huaiwu
Author_Institution :
State Key Lab. of Electron. Thin Film & Integrated Devices, Univ. of Electron. Sci. & Technol., Chengdu, China
Abstract :
The suspended rotor gyroscope has a potential advantage of high precision, in addition, it can survey 2 axes of angular rate and 3 axes of acceleration simultaneously. Two kinds of gyroscopes exist, which are electrostatically suspended rotor gyroscopes and magnetically suspended rotor gyroscopes. In this paper, the respective characteristics of various structures, operating principles, fabrication processes and performances of magnetically suspended rotor gyroscope developed in the world are summarized, especially the magnetically suspended MEMS gyroscopes, are described in detail.
Keywords :
gyroscopes; microsensors; rotors; electrostatically suspended rotor gyroscopes; fabrication process; magnetically suspended MEMS gyroscopes; magnetically suspended rotor gyroscopes; Acceleration; Electromagnetic forces; Gyroscopes; Magnetic fields; Magnetic levitation; Micromechanical devices; Space technology; Superconducting magnets; Superconductivity; Vibrations; magnetic levitation technology; micro-electro-mechanical system (MEMS) component; micromachined gyroscope; superconducting gyroscope;
Conference_Titel :
Applied Superconductivity and Electromagnetic Devices, 2009. ASEMD 2009. International Conference on
Conference_Location :
Chengdu
Print_ISBN :
978-1-4244-3686-6
Electronic_ISBN :
978-1-4244-3687-3
DOI :
10.1109/ASEMD.2009.5306617
