DocumentCode
2215636
Title
RF MEMS Switches Based on the Buckle-beam Thermal Actuator
Author
Girbau, D. ; Lázaro, A. ; Pradell, L.
Author_Institution
Universitat Politÿcnica de Catalunya (UPC), Dept. TSC, Campus Nord UPC - Mòdul D3, 08034 Barcelona - Spain, tel: + 34-93- 4016834, fax: + 34-93- 4017232
fYear
2003
fDate
Oct. 2003
Firstpage
651
Lastpage
654
Abstract
In this paper, we propose series and parallel RF MEMS-switch configurations based on the buckle-beam thermal actuator. We demonstrate the feasibility of using this actuator in RF applications with processes and materials of standard microelectronics technology. The designed switches achieve simulated on-state insertion loss of 0.09 dB and off-state isolation of -19 dB @ 2 GHz. To ease the computation of the actuator displacement, we present a simple analytical model which is validated through the results obtained from simulations in CoventorWare¿ and Sugar softwares.
Keywords
Actuators; Analytical models; Computational modeling; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Thermal conductivity; Thermal resistance; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2003 33rd European
Conference_Location
Munich, Germany
Print_ISBN
1-58053-834-7
Type
conf
DOI
10.1109/EUMA.2003.341037
Filename
4143101
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