Title :
A Grounded Co-Planar Waveguide MEMS Switch
Author :
Miyaguchi, Kenichi ; Yoshida, Yukihisa ; Nishino, Tamotsu ; Hangai, Masatake ; Suehiro, Yoshiyuki ; Lee, Sang-Seok ; Iida, Akio ; Ishida, Osami
Author_Institution :
Information Technology R&D Center, Mitsubishi Electric Corp., 5-1- 1 Ofuna, Kamakura-city, Kanagawa 247-8501, Japan. Tel: + 81-467- 41-2685, Fax: + 81-467- 41-2519, E-mail: k-miya@isl.melco.co.jp
Abstract :
A grounded co-planar waveguide (GCPW) MEMS switch is presented. The proposed switch has a movable SiN membrane with a signal line and ground lines above a dielectric-air-metal (DAM) cavity on which a ground metal is patterned, resulting in a structure of GCPW transmission line. The electrostatic force makes an RF short path to the ground metal on the bottom of the DAM cavity with metal-to-metal contact. The ground metal which covers silicon substrate makes the switch to be on a low-resistivity silicon substrate. The measured results of the switch validate the proposed structure of the switches utilizing the DAM cavity.
Keywords :
Biomembranes; Contacts; Coplanar transmission lines; Dielectric substrates; Electrostatic measurements; Microswitches; Radio frequency; Silicon compounds; Switches; Transmission line measurements;
Conference_Titel :
Microwave Conference, 2003 33rd European
Conference_Location :
Munich, Germany
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMA.2003.341041
