DocumentCode
2215794
Title
A Micromachined Tunable Cavity Resonator
Author
Mercier, D. ; Chatras, M. ; Orlianges, J.C. ; Champeaux, C. ; Catherinot, A. ; Blondy, P. ; Cros, D. ; Papapolymerou, J.
Author_Institution
IRCOM, Limoges cedex, 123 av. Albert Thomas 87060, France.
fYear
2003
fDate
Oct. 2003
Firstpage
675
Lastpage
677
Abstract
This paper focuses on a tunable resonator fabricated using bulk and surface micro-machining techniques. The resonator consists of a silicon micro-machined metalized cavity coupled with a MEMS bridge capacitor for tunability purposes. The resonator is excited using coplanar waveguide lines to avoid losses from transitions and facilitate measurements. The unloaded quality factor of the device is about 150 depending on the MEMS varactor position and the simulated tuning range is 0.4 GHz (1.45%) at 27.8 GHz.
Keywords
Bridge circuits; Capacitors; Cavity resonators; Coplanar waveguides; Loss measurement; Micromechanical devices; Q factor; Silicon; Varactors; Waveguide transitions;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2003 33rd European
Conference_Location
Munich, Germany
Print_ISBN
1-58053-834-7
Type
conf
DOI
10.1109/EUMA.2003.341043
Filename
4143107
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