• DocumentCode
    2215815
  • Title

    High Q Switchable Planar Resonator Loaded with a MEMS Digital Capacitance

  • Author

    Pothier, A. ; Blondy, P. ; Cros, D. ; Verdeyme, S. ; Guillon, P. ; Orlianges, J C. ; Champeaux, C. ; Catherinot, A.

  • Author_Institution
    IRCOM, Faculte des sciences, 123 av. A. Thomas 87060 LIMOGES - FRANCE - TEL 33 555 457 731
  • fYear
    2003
  • fDate
    Oct. 2003
  • Firstpage
    679
  • Lastpage
    682
  • Abstract
    This paper focuses on the design of a digital MEMS capacitive network and its application on tunable circuit. A high Q resonator is designed and realized. Then, this resonator is loaded with a 3 bits capacitive network to provide a digital tuning in frequency. The used MEMS micro relays performances permit to realize a high Q resonator which exhibits a 6.3GHz tuning from 16.6GHz when all bits are off to 10.3GHz when all bits are on. This approach resulted in good performances with a predicted quality factor higher than 120 for all the combinations.
  • Keywords
    Circuit optimization; Digital filters; Frequency; Micromechanical devices; Microrelays; Parasitic capacitance; Q factor; Switches; Tunable circuits and devices; Tuning;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 2003 33rd European
  • Conference_Location
    Munich, Germany
  • Print_ISBN
    1-58053-834-7
  • Type

    conf

  • DOI
    10.1109/EUMA.2003.341044
  • Filename
    4143108