DocumentCode :
2215918
Title :
Development of an active membrane probe card
Author :
Leung, Justin ; Wang, S.S.
Author_Institution :
Stanford University
fYear :
1993
fDate :
24-27 Oct 1993
Firstpage :
206
Lastpage :
208
Keywords :
Biomembranes; Circuit testing; Contact resistance; Current density; Electric breakdown; Integrated circuit testing; Metallization; Polyimides; Probes; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Integrated Reliability Workshop Final Report, 1993 International
Type :
conf
DOI :
10.1109/IRWS.1993.666315
Filename :
666315
Link To Document :
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