Title :
Development of an active membrane probe card
Author :
Leung, Justin ; Wang, S.S.
Author_Institution :
Stanford University
Keywords :
Biomembranes; Circuit testing; Contact resistance; Current density; Electric breakdown; Integrated circuit testing; Metallization; Polyimides; Probes; Temperature;
Conference_Titel :
Integrated Reliability Workshop Final Report, 1993 International
DOI :
10.1109/IRWS.1993.666315