Title :
AC analysis of MISIS capacitor
Author :
Sarkar, Angik ; Bhattacharyya, T.K.
Author_Institution :
Indian Inst. of Technol., Kharagpur
Abstract :
AC performance of MISIS(metal insulator semiconductor insulator semiconductor) capacitor has been analyzed in this paper. The performance of MISIS and MOS have been found to be similar but for the gate leakage current which is greatly suppressed in MISIS. Absence of threshold voltage shift in MISIS makes it a promising candidate for low power technology.
Keywords :
MIS capacitors; AC analysis; MISIS capacitor; metal insulator semiconductor insulator semiconductor capacitor; Dielectric measurements; Dielectrics and electrical insulation; Energy states; FETs; Frequency measurement; Leakage current; MOS capacitors; Performance analysis; Quantum capacitance; Threshold voltage;
Conference_Titel :
Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE
Conference_Location :
Gyeongju
Print_ISBN :
978-1-4244-0541-1
Electronic_ISBN :
978-1-4244-0541-1
DOI :
10.1109/NMDC.2006.4388901
