DocumentCode
2216043
Title
AC analysis of MISIS capacitor
Author
Sarkar, Angik ; Bhattacharyya, T.K.
Author_Institution
Indian Inst. of Technol., Kharagpur
Volume
1
fYear
2006
fDate
22-25 Oct. 2006
Firstpage
558
Lastpage
559
Abstract
AC performance of MISIS(metal insulator semiconductor insulator semiconductor) capacitor has been analyzed in this paper. The performance of MISIS and MOS have been found to be similar but for the gate leakage current which is greatly suppressed in MISIS. Absence of threshold voltage shift in MISIS makes it a promising candidate for low power technology.
Keywords
MIS capacitors; AC analysis; MISIS capacitor; metal insulator semiconductor insulator semiconductor capacitor; Dielectric measurements; Dielectrics and electrical insulation; Energy states; FETs; Frequency measurement; Leakage current; MOS capacitors; Performance analysis; Quantum capacitance; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology Materials and Devices Conference, 2006. NMDC 2006. IEEE
Conference_Location
Gyeongju
Print_ISBN
978-1-4244-0541-1
Electronic_ISBN
978-1-4244-0541-1
Type
conf
DOI
10.1109/NMDC.2006.4388901
Filename
4388901
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