DocumentCode
2216254
Title
A compact serial RF MEMS switch for S-band application
Author
Xiaodong, Hu ; Lumiao ; Maohui, Hou ; Qingguo, He ; Cuizhuo, Gao ; Xiwei, Bat ; Zhengping, Zhao
Author_Institution
Hebei Semicond. Res. Inst., Shijiazhuang, China
Volume
2
fYear
2001
fDate
22-25 Oct. 2001
Firstpage
733
Abstract
This paper reviews the recent progress in MEMS for radio frequency (RF) switches. Several structures were designed, fabricated and tested in the background of S-band application. Among these structures a compact serial switch was presented in detail. The performance of 21.0 dB isolation and 0.5 dB insertion loss was demonstrated in a HP 85 10A vector Network Analyzer while mounted on a rf carrier.
Keywords
losses; microswitches; microwave switches; reviews; 0.5 dB; HP 85 10A vector Network Analyzer; MEMS; S-band application; compact serial RF MEMS switch; compact serial switch; insertion loss; isolation; review; Bridge circuits; Contacts; Dielectric losses; Insertion loss; Radio frequency; Radiofrequency microelectromechanical systems; Resistors; Resonance; Switches; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Print_ISBN
0-7803-6520-8
Type
conf
DOI
10.1109/ICSICT.2001.981999
Filename
981999
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