DocumentCode :
22163
Title :
Guided-Mode Resonant \\hbox {HfO}_{2} Grating at Visible Wavelength Range
Author :
Yongjin Wang ; Xumin Gao ; Zheng Shi ; Lifeng Chen ; Lopez Garcia, Martin ; Hueting, Nikolai A. ; Cryan, Martin ; Xin Li ; Miao Zhang ; Hongbo Zhu
Author_Institution :
Gruenberg Res. Centre, Nanjing Univ. of Posts & Telecommun., Nanjing, China
Volume :
6
Issue :
2
fYear :
2014
fDate :
Apr-14
Firstpage :
1
Lastpage :
7
Abstract :
Subwavelength HfO2 gratings are realized on a freestanding 200-nm-thick HfO2 membrane with air as the low refractive index materials on top and bottom. Strong coupling between the incident light and HfO2 grating is characterized by angular-resolved reflectivity measurement, and guided-mode resonances are experimentally demonstrated with the sensitivities to the parameters and shapes of grating and the polarization of incident beam. The experimental results are consistent with numerical simulation. This work opens the way to fabricate guided-mode resonant HfO2 photonic devices in the visible wavelength range.
Keywords :
diffraction gratings; hafnium compounds; light polarisation; membranes; reflectivity; HfO2; air; angular-resolved reflectivity measurement; freestanding HfO2 membrane; guided-mode resonant HfO2 grating; incident beam polarization; incident light; low refractive index materials; size 200 nm; visible wavelength range; Filling; Gratings; Hafnium compounds; Reflectivity; Refractive index; Silicon; Subwavelength $hbox{HfO}_{2}$ grating; angular-resolved reflectivity refractive index sensing; guided-mode resonance;
fLanguage :
English
Journal_Title :
Photonics Journal, IEEE
Publisher :
ieee
ISSN :
1943-0655
Type :
jour
DOI :
10.1109/JPHOT.2014.2309641
Filename :
6758364
Link To Document :
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