Title :
Testing and analysis of lifetime of a vertical bulk MEMS switch
Author :
Miao, Lu ; Zhengping, Zhao ; Xiaodong, Hu ; Hejun, Guo ; Zou Xuefeng ; Yanqing, Liu ; Yong, Yang
Author_Institution :
Hebei Semicond. Res. Inst. (HSRI), China
Abstract :
A single crystal silicon cantilever, bulk MEMS vertical switch is presented. Multi-way switches based on the above structure were fabricated for application in the area of computer aided testing. As the sticking point of MEMS switches, operating lifetime must be first considered. Dynamic testing was imposed on such a switch until its failure. Then analysis of the failure mechanism is given. As the conclusion, heat accumulation is demonstrated as the reason for failure.
Keywords :
dynamic testing; elemental semiconductors; failure analysis; microswitches; silicon; bulk MEMS vertical switch; computer aided testing; dynamic testing; failure mechanism; heat accumulation; multiway switches; operating lifetime; single crystal silicon cantilever; Contacts; Electrodes; Fabrication; Failure analysis; Life testing; Micromechanical devices; Resonance; Silicon; Stress; Switches;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Print_ISBN :
0-7803-6520-8
DOI :
10.1109/ICSICT.2001.982007
