Title :
Millimeter wave phase shifters with periodically spaced MEMS bridges loaded
Author :
Fangmin, Guo ; Zongsheng, Lai ; Guanglong, Wu ; Shouzheng, Zhu ; Ziqiang, Zhu ; Gengqin, Yang ; Xiaohong, Ge ; Siqing, Chen ; Jianfang, Xie
Author_Institution :
Dept. of Electron Eng., East China Normal Univ., Shanghai, China
Abstract :
A basic structure of MEMS millimeter-wave phase shifters is presented, which consists of a coplanar wave-guide (CPW) transmission line periodically loaded with 8∼32 MEMS metal bridges. The switching element consists of a thin metallic membrane, which has two states, actuated or unactuated, depending on the applied bias. The phase shifters in the Micro-Electromechanical System (MEMS) techniques were measured by using the Cascade 12000 Microwave Probe and Hp-8722D Vector Network Analyzer in the frequency range of 1-10 and 30-40 GHz. The measured results demonstrate that the phase shifter with 8 bridges loaded has phase shifted 30∼ 68° and 1.095dB insertion loss at 2.395 GHz.
Keywords :
coplanar transmission lines; coplanar waveguides; microswitches; millimetre wave phase shifters; 1 to 10 GHz; 30 to 40 GHz; MEMS metal bridges; MEMS millimeter-wave phase shifters; applied bias; coplanar waveguide transmission line; switching element; thin metallic membrane; vector network analyzer; Biomembranes; Bridge circuits; Coplanar transmission lines; Coplanar waveguides; Microelectromechanical systems; Micromechanical devices; Millimeter wave technology; Phase measurement; Phase shifters; Transmission line measurements;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Print_ISBN :
0-7803-6520-8
DOI :
10.1109/ICSICT.2001.982008
