Title :
A novel compact quasi planar silicon filter at 45 GHz based on metallic periodic structure
Author :
Ferrand, P. ; Chatras, M. ; Baillargeat, D. ; Blondy, P. ; Verdeyme, S. ; Puech, J. ; Lapierre, L.
Author_Institution :
IRCOM-UMR 6615-CNRS Faculté des sciences de Limoges, 87060 Limoges Cedex, France
Abstract :
A small size planar filter at 45 GHz with a 8% bandwidth at ¿3dB and 2.6 dB insertion losses is presented. This filter is based on a metallized holes periodic lattice that forms coupled silicon resonators. The structure is realized on a 430 ¿m thick high resistivity silicon wafer using a wet etching process, the I/O CPW feeds are printed on the top of the substrate.
Keywords :
Bandwidth; Conductivity; Coplanar waveguides; Insertion loss; Lattices; Metallization; Periodic structures; Resonator filters; Silicon; Wet etching;
Conference_Titel :
Microwave Conference, 2003 33rd European
Conference_Location :
Munich, Germany
Print_ISBN :
1-58053-834-7
DOI :
10.1109/EUMA.2003.341075
