• DocumentCode
    2216546
  • Title

    A novel compact quasi planar silicon filter at 45 GHz based on metallic periodic structure

  • Author

    Ferrand, P. ; Chatras, M. ; Baillargeat, D. ; Blondy, P. ; Verdeyme, S. ; Puech, J. ; Lapierre, L.

  • Author_Institution
    IRCOM-UMR 6615-CNRS Faculté des sciences de Limoges, 87060 Limoges Cedex, France
  • fYear
    2003
  • fDate
    Oct. 2003
  • Firstpage
    805
  • Lastpage
    808
  • Abstract
    A small size planar filter at 45 GHz with a 8% bandwidth at ¿3dB and 2.6 dB insertion losses is presented. This filter is based on a metallized holes periodic lattice that forms coupled silicon resonators. The structure is realized on a 430 ¿m thick high resistivity silicon wafer using a wet etching process, the I/O CPW feeds are printed on the top of the substrate.
  • Keywords
    Bandwidth; Conductivity; Coplanar waveguides; Insertion loss; Lattices; Metallization; Periodic structures; Resonator filters; Silicon; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 2003 33rd European
  • Conference_Location
    Munich, Germany
  • Print_ISBN
    1-58053-834-7
  • Type

    conf

  • DOI
    10.1109/EUMA.2003.341075
  • Filename
    4143139
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2216546