Title :
Zeolite-coated microcantilever gas sensor
Author :
Zhou, Jia ; Li, Po ; Zhang, Song ; Zhou, Feng ; Huang, Yiping ; Yang, Pengyuan ; Bao, Minhang
Author_Institution :
Dept. of Microelectron., Fudan Univ., Shanghai, China
Abstract :
A novel freon gas sensor consisting of a piezoelectric microcantilever coated with zeolite has been developed. Excited by a PZT layer, the microcantilevers are employed to detect the concentration of gas Freon-12 by the action of the specific molecular sifter. Tests of concentrations from 10ppm to 500ppm are carried out in a practical experimental cell. The results show that the relationship between the frequency shift and the concentration is linear for concentrations lower than 100ppm. The minimum mass changing of 3.5×10-9 g and the sensitivity of -0.0026%/ppm also can be determined from the experimental results.
Keywords :
gas sensors; microsensors; piezoelectric devices; zeolites; PZT layer; freon gas sensor; gas concentration; microporous material; molecular sifter; piezoelectric microcantilever; zeolite coating; Application specific integrated circuits; Chemical technology; Equations; Gas detectors; Mechanical engineering; Microelectronics; Piezoelectric materials; Resonance; Resonant frequency; Testing;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Print_ISBN :
0-7803-6520-8
DOI :
10.1109/ICSICT.2001.982010
