Title :
A simple method for primary testing the micromachining piezoresistive accelerometer with a range more than kilo g
Author :
Huang, Quanping ; Lu, Deren
Author_Institution :
Inst. of Metall., Acad. Sinica, Shanghai, China
Abstract :
A simple and effective method using a balance to test a micromachined piezoresistive accelerometer with a range of more than a kilo g is presented. In order to perform the balance approach, a double-supported thin-plate mass structure is designed with piezoresistors on the chip, and the results are close to the theoretical values. The balance method is suitable for static performance measurement and has the advantages of ease of operation, low cost and high resolution.
Keywords :
accelerometers; balances; micromachining; microsensors; piezoresistive devices; semiconductor device testing; balance; double-supported thin-plate mass structure; electrooptics mechanical balance; micromachined piezoresistive accelerometer; piezoresistors; primary testing method; static performance measurement; Accelerometers; Equations; Laboratories; Micromachining; Microscopy; Piezoresistance; Piezoresistive devices; Probes; Testing; Wires;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Print_ISBN :
0-7803-6520-8
DOI :
10.1109/ICSICT.2001.982017
