Title :
Study of BAW filter using surface micromachining
Author :
Peng, Cong ; Yanxiang, Liu ; Yong, Ding ; Yang, Xu ; Ren Tianling ; Litian, Liu
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
A novel structure of front end passband bulk acoustic wave (BAW) filter using surface micromachining is designed. The advantage and disadvantage of fabricating BAW RF filter using surface and bulk micromachining are discussed. Porous silicon (PS) is used as a thick sacrificial layer. The process flow for fabricating BAW filters is given.
Keywords :
acoustic filters; bulk acoustic wave devices; elemental semiconductors; micromachining; porous semiconductors; silicon; BAW filter; Si; front end passband bulk acoustic wave filter; porous silicon sacrificial layer; surface micromachining; Acoustic waves; Anisotropic magnetoresistance; Band pass filters; Micromachining; Passband; Resonator filters; Silicon; Surface acoustic waves; Very large scale integration; Wet etching;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Print_ISBN :
0-7803-6520-8
DOI :
10.1109/ICSICT.2001.982026
