A novel electrostatically driven bulk-micromachined on-off optical switch

Author

Wang, Cong-Shun ; Fang, Jing ; Chang, Sheng ; Yang, Zhen-Chuan ; Zhang, Da-Cheng

Author_Institution

Dept. of Mech. & Eng. Sci., Peking Univ., Beijing, China

Volume

2

fYear

2001

fDate

22-25 Oct. 2001

Firstpage

847

Abstract

In this paper, a novel bulk micromachined on-off optical switch is proposed with the techniques of silicon-glass wafer bonding and deep reactive ion etching. The micromechanical optical switch includes a slope anchor and a beam with a shutter, in which the beam is laterally driven by an electrostatic actuator. It is important to design and optimize the slope anchor to produce a large shutter displacement with low driving voltage. FEM simulation with ANSY 5.5 is made to analyze the dynamic behavior of the switch. Meanwhile, the pull-in voltage is achieved by using the solution of Intellisute 4.0, from that the frequency shift is obtained. The optimization offers a reasonable design for the optical switch array based on the present fabrication technology.

Keywords

electrostatic actuators; elemental semiconductors; finite element analysis; micromachining; optical switches; optimisation; silicon; sputter etching; wafer bonding; ANSY 5.5; FEM; Intellisute 4.0; Si; deep reactive ion etching; electrostatic actuator; electrostatically driven bulk-micromachined on-off optical switch; frequency shift; optimization; pull-in voltage; silicon-glass wafer bonding; Analytical models; Design optimization; Electrostatic actuators; Etching; Frequency; Low voltage; Micromechanical devices; Optical arrays; Optical switches; Wafer bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on

Print_ISBN

0-7803-6520-8

Type

conf

DOI

10.1109/ICSICT.2001.982028

Filename

982028