DocumentCode
2217393
Title
Model-based dummy feature placement for oxide chemical-mechanical polishing manufacturability
Author
Tian, Ruiqi ; Wong, D.F. ; Boone, Robert
Author_Institution
University of Texas
fYear
2000
fDate
2000
Firstpage
667
Lastpage
670
Keywords
Chemicals; Computer aided manufacturing; Manufacturing processes; Permission; Planarization; Semiconductor device modeling; Surfaces; Tiles; Very large scale integration; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Design Automation Conference, 2000. Proceedings 2000
Print_ISBN
1-58113-187-9
Type
conf
DOI
10.1109/DAC.2000.855398
Filename
855398
Link To Document