DocumentCode :
2217393
Title :
Model-based dummy feature placement for oxide chemical-mechanical polishing manufacturability
Author :
Tian, Ruiqi ; Wong, D.F. ; Boone, Robert
Author_Institution :
University of Texas
fYear :
2000
fDate :
2000
Firstpage :
667
Lastpage :
670
Keywords :
Chemicals; Computer aided manufacturing; Manufacturing processes; Permission; Planarization; Semiconductor device modeling; Surfaces; Tiles; Very large scale integration; Virtual manufacturing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Design Automation Conference, 2000. Proceedings 2000
Print_ISBN :
1-58113-187-9
Type :
conf
DOI :
10.1109/DAC.2000.855398
Filename :
855398
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2217393
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