DocumentCode :
2217417
Title :
Practical iterated fill synthesis for CMP uniformity
Author :
Chen, Yu ; Kahng, Andrew B. ; Robins, Gabriel ; Zelikovsky, Alexander
Author_Institution :
UCLA Computer Science Dept.
fYear :
2000
fDate :
2000
Firstpage :
671
Lastpage :
674
Keywords :
Chemical processes; Computational geometry; Computer science; Filling; Greedy algorithms; Linear programming; Manufacturing processes; Permission; Semiconductor device modeling; Solid modeling;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Design Automation Conference, 2000. Proceedings 2000
Print_ISBN :
1-58113-187-9
Type :
conf
DOI :
10.1109/DAC.2000.855399
Filename :
855399
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2217417
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