Micromechanical slow-velocity delay lines

We consider a chain of coupled micromechanical resonators as a delay line for radio-frequency signals. Wave propagation in the chain is generated and detected using capacitive transducers. Analytical results, numerical simulations and first measurements for the response of a prototype device are presented. The delay line is shown to have a bandpass response and a very low signal group velocity of the order of only few meters per second. Weaknesses of the first prototypes are identified through simulations and a more optimal design is suggested.