• DocumentCode
    2217537
  • Title

    A Low-Loss Distributed 2-Bit W-Band MEMS Phase Shifter

  • Author

    Hung, Juo-Jung ; Dussopt, Laurent ; Rebeiz, Gabriel M.

  • Author_Institution
    University of Michigan, Department of Electrical Engineering and Computer Sciences, 1301 Beal Avenue, Ann Arbor, Michigan, 49109-2122, USA. E-mail: jjhung@umich.edu
  • fYear
    2003
  • fDate
    Oct. 2003
  • Firstpage
    983
  • Lastpage
    985
  • Abstract
    A low-loss 2-bit wide-band distributed microelectromechanical system transmission line (DMTL) phase shifter has been developed on a 500 ¿m glass substrate for W-band operation. The coplanar waveguide (CPW) design is periodically loaded by MEMS switches in series with high-Q MAM (Metal-Air-Metal) capacitors, and shows a reflection coefficient better than -11 dB through the whole W-band frequency range (75-110 GHz) and phase shifts of 0°, 89.3°, 180.1°, 272° at 81 GHz with an average insertion losses of -2.2 dB. This is currently the lowest-loss phase shifter at W-band frequencies.
  • Keywords
    Capacitors; Coplanar transmission lines; Coplanar waveguides; Frequency; Glass; Microelectromechanical systems; Micromechanical devices; Microswitches; Phase shifters; Wideband;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 2003 33rd European
  • Conference_Location
    Munich, Germany
  • Print_ISBN
    1-58053-834-7
  • Type

    conf

  • DOI
    10.1109/EUMA.2003.341128
  • Filename
    4143184