Formation of filtered intense vacuum-arc plasma flows

Plasma flow formation in a system with axially symmetric magnetic fields of acute angled and bottle-like configurations by primary vacuum-arc plasma flow injection along the system axis and removal of it through the ring magnetic slot in the radial direction has been investigated. The system provides the suppression of macroparticles flow in its output. The ion component of the injected flow passes through the system nearly without any losses and increases in gas (Ar, N₂) presence. The investigated system allows the formation of flows, which provide uniform ion plasma processing of surfaces with areas ten times larger than those obtained by conventional filtered plasma sources