• DocumentCode
    2217691
  • Title

    Instability in post-breakdown conduction in ultra-thin gate oxide

  • Author

    Chen, T.P. ; Luo, Y.L.

  • Author_Institution
    Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore, Singapore
  • Volume
    2
  • fYear
    2001
  • fDate
    22-25 Oct. 2001
  • Firstpage
    954
  • Abstract
    Both switching and snapback between two well-defined states (a lower impedance state and a high impedance state) in the post-breakdown conduction in ultra-thin silicon dioxide films have been observed, and a comparison between them was made. The current-voltage relationship of each state was found to follow a power law for both the switching and snapback. The switching and snapback can be explained in terms of the on/off state of a second conductive percolation path of neutral oxide traps due to the de-trapping/trapping or neutral trap generation at certain SiO2 lattice sites (strategic positions) during the measurements.
  • Keywords
    MOSFET; electron traps; semiconductor device breakdown; semiconductor device reliability; silicon compounds; MOSFETs; SiO2; current-voltage relationship; impedance state; lattice sites; neutral oxide traps; neutral trap generation; on/off state; post-breakdown conduction; power law; reliability; second conductive percolation path; snapback; strategic positions; switching; ultra-thin gate oxide; well-defined states; Breakdown voltage; Current measurement; Electric breakdown; Force measurement; Impedance measurement; Leakage current; MOSFET circuits; Semiconductor films; Silicon compounds; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
  • Print_ISBN
    0-7803-6520-8
  • Type

    conf

  • DOI
    10.1109/ICSICT.2001.982053
  • Filename
    982053