DocumentCode :
2217691
Title :
Instability in post-breakdown conduction in ultra-thin gate oxide
Author :
Chen, T.P. ; Luo, Y.L.
Author_Institution :
Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore, Singapore
Volume :
2
fYear :
2001
fDate :
22-25 Oct. 2001
Firstpage :
954
Abstract :
Both switching and snapback between two well-defined states (a lower impedance state and a high impedance state) in the post-breakdown conduction in ultra-thin silicon dioxide films have been observed, and a comparison between them was made. The current-voltage relationship of each state was found to follow a power law for both the switching and snapback. The switching and snapback can be explained in terms of the on/off state of a second conductive percolation path of neutral oxide traps due to the de-trapping/trapping or neutral trap generation at certain SiO2 lattice sites (strategic positions) during the measurements.
Keywords :
MOSFET; electron traps; semiconductor device breakdown; semiconductor device reliability; silicon compounds; MOSFETs; SiO2; current-voltage relationship; impedance state; lattice sites; neutral oxide traps; neutral trap generation; on/off state; post-breakdown conduction; power law; reliability; second conductive percolation path; snapback; strategic positions; switching; ultra-thin gate oxide; well-defined states; Breakdown voltage; Current measurement; Electric breakdown; Force measurement; Impedance measurement; Leakage current; MOSFET circuits; Semiconductor films; Silicon compounds; Voltage measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Print_ISBN :
0-7803-6520-8
Type :
conf
DOI :
10.1109/ICSICT.2001.982053
Filename :
982053
Link To Document :
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