An accurate determination of the characteristic impedance of lossy lines on chips based on high frequency S-parameter measurements

Author

Winker, T.-M. ; Dutta, Lohit Sagar ; Grabinski, Hartmut

Author_Institution

Lab. fur Informationtechnology, Hannover Univ., Germany

fYear

1996

fDate

6-7 Feb 1996

Firstpage

190

Lastpage

195

Abstract

A very accurate, novel determination of the characteristic impedance of interconnects on semiconducting substrates has been developed. The method is based upon high frequency, S-parameter measurements of two transmission lines of different lengths. The influence of the contact structures of the measurement probes are taken into account with the help of three additional measurements. The mathematical background of the method is presented. A comparison of the results obtained from measurements and from calculations is given and shows an excellent agreement

Keywords

S-parameters; electric impedance measurement; integrated circuit interconnections; multichip modules; IC interconnects; MCMs; characteristic impedance; contact structures; high frequency S-parameter measurements; lossy lines; measurement probes; semiconducting substrates; Frequency measurement; Impedance measurement; Integrated circuit interconnections; Performance evaluation; Probes; Scattering parameters; Semiconductor device measurement; Silicon; Substrates; Transmission line measurements;

fLanguage

English

Publisher

ieee

Conference_Titel

Multi-Chip Module Conference, 1996. MCMC-96, Proceedings., 1996 IEEE

Conference_Location

Santa Cruz, CA

Print_ISBN

0-8186-7286-2

Type

conf

DOI

10.1109/MCMC.1996.510793

Filename

510793