• DocumentCode
    2219020
  • Title

    Graphene directly grown on SiO2-based insulators

  • Author

    Seifarth, O. ; Lippert, G. ; Dabrowski, J. ; Lupina, G. ; Mehr, W. ; Lemme, M.C.

  • Author_Institution
    IHP, Frankfurt (Oder), Germany
  • fYear
    2011
  • fDate
    27-28 Sept. 2011
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Strong effort is devoted to grow graphene directly on insulators to create a technological step towards cost effective mass production of high-frequency transistors on Si. We have shown recently, that direct graphene growth can be achieved on silicate substrates by solid carbon source deposition. Here, we present a study on the growth of graphene on insulator by means of Raman and photoelectron spectroscopy, corroborated by density functional theory calculations. We address temperature dependence and the correlation between graphene quality and the number of layers. We show that this approach may open a pathway to Si-compatible graphene growth for electronic applications.
  • Keywords
    Raman spectra; density functional theory; graphene; photoelectron spectra; solid phase epitaxial growth; C; Raman spectroscopy; SiO2; density functional theory; graphene; high-frequency transistors; insulators; photoelectron spectroscopy; solid carbon source deposition; temperature dependence; Carbon; Carbon dioxide; FETs; Insulators; Raman scattering; Silicon; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference Dresden (SCD), 2011
  • Conference_Location
    Dresden
  • Print_ISBN
    978-1-4577-0431-4
  • Type

    conf

  • DOI
    10.1109/SCD.2011.6068742
  • Filename
    6068742