DocumentCode
2219020
Title
Graphene directly grown on SiO2 -based insulators
Author
Seifarth, O. ; Lippert, G. ; Dabrowski, J. ; Lupina, G. ; Mehr, W. ; Lemme, M.C.
Author_Institution
IHP, Frankfurt (Oder), Germany
fYear
2011
fDate
27-28 Sept. 2011
Firstpage
1
Lastpage
4
Abstract
Strong effort is devoted to grow graphene directly on insulators to create a technological step towards cost effective mass production of high-frequency transistors on Si. We have shown recently, that direct graphene growth can be achieved on silicate substrates by solid carbon source deposition. Here, we present a study on the growth of graphene on insulator by means of Raman and photoelectron spectroscopy, corroborated by density functional theory calculations. We address temperature dependence and the correlation between graphene quality and the number of layers. We show that this approach may open a pathway to Si-compatible graphene growth for electronic applications.
Keywords
Raman spectra; density functional theory; graphene; photoelectron spectra; solid phase epitaxial growth; C; Raman spectroscopy; SiO2; density functional theory; graphene; high-frequency transistors; insulators; photoelectron spectroscopy; solid carbon source deposition; temperature dependence; Carbon; Carbon dioxide; FETs; Insulators; Raman scattering; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference Dresden (SCD), 2011
Conference_Location
Dresden
Print_ISBN
978-1-4577-0431-4
Type
conf
DOI
10.1109/SCD.2011.6068742
Filename
6068742
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