Title :
A Curve Interpretation and Diagnostic Technique for Industrial Processes
Author :
Dolins, Steven B. ; Reese, Jon D.
Author_Institution :
Univeritv of Wisconsin - Parkside
Keywords :
Computer science; Digital signal processing; Heuristic algorithms; Manufacturing industries; Manufacturing processes; Plasma measurements; Production facilities; Semiconductor device manufacture; Signal processing; Signal processing algorithms;
Conference_Titel :
Applications of Industrial Electronics Systems, 1990. Proceedings. The First International Conference on
DOI :
10.1109/AIES.1990.666343