DocumentCode
2219240
Title
Monolithically Integrated Silicon-IMPATT Oscillator at 93 GHz
Author
Schöllhorn, C. ; Morschbach, M. ; Oehme, M. ; Hasch, J. ; Irion, H. ; Kasper, E.
Author_Institution
Institut fÿr Halbleitertechnik, Universitÿt Stuttgart, Pfaffenwaldring 47, 70569 Stuttgart, Germany
fYear
2003
fDate
Oct. 2003
Firstpage
1291
Lastpage
1294
Abstract
In this paper monolithically integrated IMPATT diodes are presented. To prove the concept of completely monolithic integration, no special heatsinks or other constructions to optimize cooling were used. The diodes were grown with molecular beam epitaxy on a high resistivity silicon substrate. S-Parameter measurements were performed from 85 GHz up to 110 GHz, showing high negative impedances above the avalanche frequency. Oscillations at a frequency near 93 GHz were observed with the designed resonator circuit.
Keywords
Conductivity; Cooling; Diodes; Frequency; Heat sinks; Molecular beam epitaxial growth; Monolithic integrated circuits; Oscillators; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2003 33rd European
Conference_Location
Munich, Germany
Print_ISBN
1-58053-834-7
Type
conf
DOI
10.1109/EUMA.2003.340855
Filename
4143261
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