FEM simulation and its application in MEMS design

Author

Jia, Chenping ; Reuter, Danny ; Wen, Zhiyu ; Baum, Mario ; Wiemer, Maik ; Gessner, Thomas

Author_Institution

Center for Micro Technol. (ZFM), Chemnitz Univ. of Technol., Chemnitz, Germany

fYear

2011

fDate

27-28 Sept. 2011

Firstpage

1

Lastpage

4

Abstract

This paper presents the simulated static and dynamic properties of a micro capacitive transducer by using commercial FEM software - ANSYS. Evaluation of the stress distribution in the stretched membrane of the transducer indicates that the location of the access holes plays an important role for reliable device fabrication and operation. Acoustic simulation shows that the pressure variation in the radiation field of a piston source can be explicitly demonstrated. Experiment results validate the effectiveness of FEM simulation as a useful tool for the design of MEMS devices and rough estimation of their properties.

Keywords

capacitive sensors; finite element analysis; microsensors; ANSYS FEM software; FEM simulation; MEMS device design; access holes; acoustic simulation; device fabrication; microcapacitive transducer; piston source radiation field; pressure variation; stress distribution evaluation; Acoustics; Atmospheric modeling; Finite element methods; Micromechanical devices; Pistons; Stress; Transducers; ANSYS; FEM simulation; capacitive transducer; microelectromechnical systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference Dresden (SCD), 2011

Conference_Location

Dresden

Print_ISBN

978-1-4577-0431-4

Type

conf

DOI

10.1109/SCD.2011.6068759

Filename

6068759